Low power AlGaN/GaN MEMS pressure sensor for high vacuum application
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Sensors and Actuators A: Physical
سال: 2020
ISSN: 0924-4247
DOI: 10.1016/j.sna.2020.112217